(Charles) Kin P. Cheung
Associate
Professor
Dept. of Electrical & Computer Eng.
Rutgers University
94 Brett Rd., Piscataway, NJ 08854-8058
(732)-445-0680 Fax: (732)-445-2820
kpckpc@ieee.org
Last updated: Aug. 15, 2005
My
Office: EE115 My Lab: EE119
Office
hour: Wed. 2:00pm – 4:00pm
_____________________________________________________________________________________
My back ground
I got my Ph.D. degree in Physical
Chemistry from the
After the post doc, I became a
member of technical staff in Bell Labs at Murray Hill, but in a different
division. I have been involved in the research of advanced IC technologies such
as deposition of thin films, growth of thin films, thin films etching,
technology integration and device/circuit reliability. Along the way, I
published over 100 papers, written a monograph, a book chapter, edited two
conference proceedings and gotten an award for my work in the field of plasma
charging damage of thin gate-oxide. It was a fun 18 years.
Now that I am a professor, my interest in research is into longer term, more speculative technology.
Here are some of my
current interests:
Wafer level MEMS packaging technology.
This is an important technology bottleneck for micro-electromechanical-systems (MEMS).
Micro plasma
system for display and lighting applications.
Novel sensors
that leverage MEMS technology, wafer level packaging and micro plasma
technology.
Collective vibration mode of immobilized large molecules in the form of self-assembled monolayer.
This is a basic science research project that can lead to major applications.
Defects in gate
dielectrics and its impact on advanced integrated circuit reliability.
This is one of the key problem area in current and future integrated circuit technology.
Work function
engineering and materials science of interface.
Polymer based
random access memory.
Nanoscale
materials.
Results from my hard work (last updated: July
22, 2004)
Teaching
Course: 14:332:590
Integrated Circuits
This course will emphasize on the processing technologies used in
making silicon IC and the process integration issues. Even though integrated
circuits from materials other than silicon are getting more popular, none is
more mature and in wide spread use than silicon IC. In this course, instead of
attempting to cover a wide range of processing technologies, I will do an in
depth coverage of key silicon processing technologies such as wet and dry
etching, thin film growth and deposition, diffusion and ion implantation, etc.
The goal is to give students a good foundation on processing technology so that
they can understand processing methods of other materials and structures when
the need arises.
The true
challenge of any processing technology is in integration. Although the
integration issues for silicon IC are quite different from other materials and
structures, familiar with the issues in silicon integration will be useful for
other technology as well. This course will emphasize on processing constraint
due to very large scale integration issues and the solutions.
The text book
for this course is Silicon VLSI Technology by James D. Plummer,
Michael D. Deal and Peter B. Griffin published by Prentice Hall, 2000. ISBN
0-13-085037-3.
Note:
A very good source of many of the topics covered in this class is: IBM Journal of R &
D - Vol. 43, Nos. 1/2, 1999 - Plasma processing
For
a good article on cleaning technology, please see:
http://www.research.ibm.com/journal/rd/433/heyns.html
Course: 14:332:465
Physical Electronic
This
is device physics course. The emphasis is on basic physics that governs the
property of electronic devices. This course is the first course to more
advanced topics in electronics. It is the gateway for advanced study in
electronics. Text book: Semiconductor
Physics and Devices, Donald A. Neamen
Course: 14:332:464 Signal Integrity in
High-Speed Digital Circuits
Texts:
High-Speed Digital System Design, S. H. Hall, G. W. Hall and J. A. McCall;
(References)
Digital Signal Integrity, B. Young
High-Speed Digital Design, H. W. Johnson and M. Graham
EMC and the Printed Circuit Board, M. I. Montrose
Prerequisites: (14:332:366) Digital Electronics, (14:332:382) Electromagnetic
Fields
Course Description:
High-speed digital system has unique problems
associated with the speed of the signal. Traditional design courses do not
prepare designer to deal with these problems. Since almost all designs are
moving toward ever higher speed, signal integrity problem becomes everyday
reality for circuit designers. This course will cover the basic physical
principles behind various phenomena that lead to signal integrity problems in
high-speed digital circuits. The emphasis will be on principles that can be
applied to printed circuit boards (PCB), multi-chip-modules (MCM), system-on-package
(SoP), system-onchip (SoC) and very-high performance integrated circuits (IC).
The course will cover basic digital signaling, transmission-line, termination
methods, differential signaling, electro-magnetic radiation, capacitive
crosstalk, inductive crosstalk, simultaneous switching noise, ground bounce,
measurement techniques, return path and non-ideal return path.